Effect of Surface Functionalization of Metal Wire on Electrophysical Properties of Inductive Elements

摘要

The development of the microelectronicsnindustry requires a new element basis with reduced size andnincreased functionality. The most important components innmodern microelectronic integrated circuits are passivenelements. One of the key challenges in order to improve thenfunctionality of integrated circuits is to increase the quality ofnpassive elements composing them. In this paper we suggest annovel approach to increase the quality factor Q of inductors bynthe surface modification and functionalization of the metalncomponents. Ultrasound induced surface modification of metalnwires led to the formation of a porous surface structure, whichnfurther can be functionalized with magnetite nanoparticlesnusing layer-by-layer assembly technique. The surface modificationnand deposition of magnetite nanoparticles was investigated with SEM, XRD, and contact angle measurements.nAdditionally, inductance and resistance measurements, as the main parameters determining the Q-factor of inductors, werencarried out. Samples with high number of magnetic nanoparticle−polyelectrolyte bilayers demonstrate a significant increase inninductance and a slight decrease in resistance in comparison to uncoated ones. The combination of these factors led tonenhancement the Q-factor of the investigated inductive elements.