Structural Changes of Porous Silicon Surface with Thermal Annealing Studied by~29 Si Nuclear Magnetic Resonance Spectroscopy and Fourier Transform Infrared Spectroscopy

摘要

~29Si nuclear magnetic resonance (NMR) spectra and infrared spectra for as -prepared and annealed porous silicon(PS) samples to characterize the change of PS structure. Annealing changed the infrared spectra remarkably: after 4-h annealing, the signals due to SiH_2 disappearedand the intensity of the signals due to SiH decreased. On the other hand, the~29Si NMR spectra with magic-angle spinning (MAS)were not much affectedby the annealing. The linewidth of spectra without MAS, however, increased with anneling in the case of SiH_2 species, and (SiH)_2dimer structure was produced during the annealing.