Results of potential exposure assessments during the maintenance and cleanout of deposition equipment

摘要

This study is a compilation of results obtained during the cleanout of deposition equipment such as chemical vapor deposition or physical vapor deposition The measurement campaigns aimed to evaluate the potential exposure to nanoaerosols in the occupational environment and were conducted in the workspace. The characterization of aerosols includes measurements of the concentration using condensation particle counters and measurements of the size distribution using fast mobility particle sizer, scanning mobility particle sizer, and electrical low pressure impactor (ELPI). Particles were sampled using collection membranes placed on the ELPIs stages. The samples were analyzed with an SEM–EDS to provide information including size, shape, agglomeration state, and the chemical composition of the particles. The majority of the time, no emission of nanoparticles (NPs) was measured during the use of the molecular deposition equipment or when opening the chambers, mainly due to the enclosed processes. On the other hand, the maintenance of the equipment, and especially the cleanout step, could induce high concentrations of NPs in the workplace following certain processes. Values of around 1 million particles/cm3 were detected with a size distribution including a high concentration of particles around 10 nm.