Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology

摘要

We describe a fabrication method for arrays of microlenses of low f-number by using a surface coating and dispensing technology. We demonstrate how to achieve a low f-number by selectively changing the surface wettability, as well as how to precisely control the f-number through control of the dispensing time. This advance enables the fabrication of arrays of microlenses with diameters varying from 400 to 1400μm, f-number as low as 0.95. In addition, the optical performance tests indicate that this method is suitable for high performance microlens array fabrication. This dispensing technology may be low cost and allow fast fabrication of highspeed microlens arrays, and may thus be particularly useful for biologically inspired advanced optical systems.