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Copper doping effect on the properties in ZnO films deposited by sol-gel

机译:铜掺杂对溶胶 - 凝胶沉积的ZnO薄膜性质的影响

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摘要

In this work, an aqueous sol-gel route involving zinc acetate dihydrate and cupric chloride as precursors was used to obtain intrinsic and Cu-doped ZnO thin films onto SiO_2/n-Si and glass substrates. Various concentrations of Cu ranging from 1 to 5% were used to modify the ZnO crystal structure. The effect of Cu-doping was evaluated by means of various microscopic and spectroscopic techniques. Scanning electron microscopy (SEM) proved increased grain density and evolution of grain shape from circular to hexagonal with Cu incorporation in the ZnO host lattice. Furthermore, atomic force microscopy (AFM) revealed that grain size increases with increasing Cu concentration. Moreover, X-ray diffraction (XRD) investigations reported a small influence of Cu-doping on the lattice constant value. However, Cu-doping level impacts the mean crystallite size, and consequently, the amount of dislocations emerging from the boundaries of the mosaic blocks. Finally, optical measurements proved the decrease of film transparency, as well as bandgap narrowing effect with increasing dopant concentration from 1 to 5%. As a result, copper incorporation into ZnO films using the proposed low-cost sol-gel method has the ability to tune the bandgap of ZnO-based materials and to promote extra charge carrier generation, which is highly beneficial for UV optoelectronic applications.
机译:在这项工作中,使用含有醋酸锌二水合物和氯化铜作为前体的溶胶 - 凝胶途径,以获得在SiO_2 / N-Si和玻璃基板上的本征和Cu掺杂的ZnO薄膜。使用1至5%的各种浓度的Cu均用于改变ZnO晶体结构。通过各种微观和光谱技术评价Cu掺杂的效果。扫描电子显微镜(SEM)经证明了ZnO宿主格子中Cu掺入的圆形到六边形的晶粒密度和晶粒形状的演化。此外,原子力显微镜(AFM)显示晶粒尺寸随着Cu浓度的增加而增加。此外,X射线衍射(XRD)研究报告了Cu掺杂对晶格常数值的少量影响。然而,Cu掺杂水平会影响平均微晶尺寸,因此,从马赛克块的边界产生的脱位量。最后,光学测量证明了薄膜透明度的降低,以及带隙变窄效果,随着掺杂剂浓度从1〜5%增加。结果,使用所提出的低成本溶胶 - 凝胶法掺入ZnO膜中的铜膜具有调节ZnO基材料的带隙并促进额外的电荷载流子产生,这对于UV光电应用具有高度有益。

著录项

  • 来源
    《Journal of materials science》 |2021年第4期|4021-4033|共13页
  • 作者单位

    National Institute for Research and Development in Microtechnologies - IMT Bucharest 126A Erou lancu Nicolae Street 077190 Bucharest Romania;

    National Institute for Research and Development in Microtechnologies - IMT Bucharest 126A Erou lancu Nicolae Street 077190 Bucharest Romania Faculty of Applied Chemistry and Materials Science University Politehnica of Bucharest Gh. Polizu St 1-7 011061 Bucharest Romania;

    National Institute for Research and Development in Microtechnologies - IMT Bucharest 126A Erou lancu Nicolae Street 077190 Bucharest Romania;

    National Institute for Research and Development in Microtechnologies - IMT Bucharest 126A Erou lancu Nicolae Street 077190 Bucharest Romania Faculty of Applied Chemistry and Materials Science University Politehnica of Bucharest Gh. Polizu St 1-7 011061 Bucharest Romania;

    National Institute for Research and Development in Microtechnologies - IMT Bucharest 126A Erou lancu Nicolae Street 077190 Bucharest Romania;

    National Institute for Research and Development in Microtechnologies - IMT Bucharest 126A Erou lancu Nicolae Street 077190 Bucharest Romania;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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