Formation of patterned microstructures of polycrystalline ceramics from precursor polymers using micromolding in capillaries

摘要

Micromolding in capillaries has been used to generate patterned microstructures of ZrO_2 or SnO_2 from its polymeric precursor. After patterning, the amorphous precursor was converted into the desired polycrystalline ceramic material by calcination in air at 460 deg. C. The final phase for each ceramic material was determined by powder x-ray diffraction. The shrinkage of the precursor material during pyrolysis was investigated by scanning electron microscopy and atomic force microscopy. These ceramic microstructures could be either supported on solid substrates or released as freestanding fibers and membranes. Their lateral dimensions could be as small as approximately 500 nm.