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Gallium Indium Nitride-Based Green Lasers

机译:氮化镓铟基绿色激光器

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摘要

In this review article, we describe group-III nitride laser diodes that emit light in the green spectral range, using epitaxial structures grown on gallium nitride (GaN) substrates with c- and semipolar-plane orientations. We address the motivation for these lasers, the challenges faced in creating them, and the progress made in this field to date. Different structural design choices are described, taking into account specific material properties and crystal growth requirements for these orientations. We review various properties of the materials involved, including optical gain, optical confinement, internal optical losses and carrier injection. We also discuss mechanical strain during the growth of active and passive regions, and the way in which it limits the structural design. Various aspects of laser chip fabrication are discussed, including self-aligned ridge waveguides and facet formation. Finally, we outline the status of green laser reliability and challenges in this area.
机译:在这篇综述文章中,我们描述了使用在氮化镓(GaN)衬底上生长的具有c平面和半极性平面方向的外延结构,在绿色光谱范围内发光的III族氮化物激光二极管。我们将探讨这些激光器的动机,制造它们所面临的挑战以及迄今为止在该领域取得的进展。考虑到这些方向的特定材料特性和晶体生长要求,描述了不同的结构设计选择。我们回顾了所涉及材料的各种特性,包括光学增益,光学限制,内部光学损耗和载流子注入。我们还讨论了有源区和无源区生长期间的机械应变,以及其限制结构设计的方式。讨论了激光芯片制造的各个方面,包括自对准脊形波导和刻面形成。最后,我们概述了绿色激光可靠性的现状以及该领域的挑战。

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