Photonic Crystal Microcavities in SOI Photonic Wires for WDM Filter Applications

摘要

We report on the design, fabrication, and optical characterization of silicon-on-insulator-based one-dimensional (1-D) photonic crystal (PhC) microcavities. The scope of this paper lies on filters for communication systems around 1.55-$muhbox{m}$ wavelength. Detailed calculations of filter performance against the relevant device layout parameters are given. Resonant cavity modes with quality factors as high as $Qapprox 630$ in the 1.55- $muhbox{m}$ wavelength band were measured for filters comprised of two PhC mirrors containing 2 $times$ 5 holes, that were 200 nm in diameter. This is the highest $Q$-value reported of such a filter up to now.