机译:用O〜(2+)离子对薄TiO_2薄膜辐射硬化和改性的低能量辐射效果
Inst Nucl Phys Alma Ata Kazakhstan|Eurasian Natl Univ LN Gumilyov Nur Sultan Kazakhstan;
Inst Nucl Phys Alma Ata Kazakhstan|Eurasian Natl Univ LN Gumilyov Nur Sultan Kazakhstan;
Inst Nucl Phys Alma Ata Kazakhstan|Eurasian Natl Univ LN Gumilyov Nur Sultan Kazakhstan;
Al Farabi Kazakh Natl Univ Alma Ata Kazakhstan;
Inst Nucl Phys Alma Ata Kazakhstan|Eurasian Natl Univ LN Gumilyov Nur Sultan Kazakhstan|Ural Fed Univ Ekaterinburg Russia;
Thin films; Radiation modification; Hardness; Band gap; TiO2;