Photo-Acoustic Measurement of Thermal Conductivity of Thin Films and Bulk Materials

摘要

The photoacoustic (PA) technique is one of many techniques for measuring thermal con- ductivity of thin films. Compared with other techniques for thermal conductivity measure- ment, the photoacoustic method is relatively simple, yet is able to provide accurate ther- mal conductivity data for many types of thin films and bulk materials. In this work, the PA measurement in a high frequency range is made possible by a newly developed PA apparatus, which extends the limit of the PA technique.