A1_2O_3 nanotubes and nanorods fabricated by coating and filling of carbon nanotubes with atomic-layer deposition

摘要

Aluminum oxide (A1_2O_3) nanotubes and nanorods were fabricated by coating and filling of multiwalled carbon nanotubes (MWNTs) with atomic-layer deposition (ALD). A1_2O_3 material was deposited on the MWNTs at a substrate temperature of 300℃ using trimethylaluminum and distilled water. Transmission electron microscopy, high resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy, and selected area electron diffraction of the deposited MWNTs revealed that amorphous A1_2O_3 material coats the MWNTs conformally and that this material fills the inside of the MWNTs. These illustrate that ALD has an excellent capability to coat and fill any three-dimensional shapes of MWNTs conformally without producing any crystallites.