Influence of growth process parameters on weight sensor readings in the Stepanov (EFG) technique

摘要

Weight sensors are widely used in automated control systems for growing crystals from the melt by Czochralski technique. They measure a growing crystals weight, a meniscus weight and a force of the surface tension. In order to accomplish an automated crystal growth process by the Stepanov (EFG) technique we studied the influence of the growth process parameters on the force sensor readings. The parameters analyzed were: the pulling rate, the height of the die edges above the melt pool, the power of heating. The dependence of sensor readings on the pulling rae has been examined when a crystal was grown in the form of a tube from dies with various lengths of capillary channels.