Chemical planarization of GaN using hydroxyl radicals generated on a catalyst plate in H_2O_2 solution

J. Murata; A. Kubota; K. Yagi; Y. Sano; H. Hara; K. Arima; T. Okamoto; H. Mimura; K. Yamauchi

首页> 外文期刊>Journal of Crystal Growth >Chemical planarization of GaN using hydroxyl radicals generated on a catalyst plate in H_2O_2 solution

【24h】

Chemical planarization of GaN using hydroxyl radicals generated on a catalyst plate in H_2O_2 solution

机译：使用H_2O_2溶液中催化剂板上生成的羟基自由基对GaN进行化学平坦化

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

A novel technique for planarizing gallium nitride (GaN) wafers has been developed. In this method, hydroxyl radicals (OH~·) catalytically generated on a polishing plate are used to oxidize the surface of a GaN wafer, and the produced oxide is dissolved in

机译：已经开发出用于平坦化氮化镓（GaN）晶片的新技术。在该方法中，使用在抛光板上催化生成的羟基自由基（OH〜·）氧化GaN晶片的表面，并将生成的氧化物溶解在

著录项

来源
《Journal of Crystal Growth》 |2008年第9期|p.1637-1641|共5页
作者
J. Murata; A. Kubota; K. Yagi; Y. Sano; H. Hara; K. Arima; T. Okamoto; H. Mimura; K. Yamauchi;
展开▼
作者单位

Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-Oka, Suita, Osaka 565-0871, Japan;

展开▼
收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类晶体学;
关键词
A1. etching; A1. surface processes; B1. nitrides; B2. semiconducting III-V materials;

机译：A1。蚀刻;A1。表面工艺;B1。氮化物;B2。半导体III-V材料;

相似文献

外文文献
中文文献
专利

1. Photochemical reactions between bromophenols and hydroxyl radical generated in aqueous solution: A laser flash photolysis study [J] . Jiang Jingqiu, Zhao Hongxia, Liu Sisi, Journal of Photochemistry and Photobiology, A. Chemistry . 2017,第期

机译：在水溶液中产生的溴苯酚和羟基自由基之间的光化学反应：激光闪光光解
2. Hydroxyl radical and non-hydroxyl radical pathways for trichloroethylene and perchloroethylene degradation in catalyzed H_2O_2 propagation systems [J] . Watts Richard J., Teel Amy L. Water Research . 2019,第AUGa1期

机译：催化的H_2O_2传播系统中三氯乙烯和四氯乙烯降解的羟自由基和非羟自由基途径
3. Hydroxyl radical and non-hydroxyl radical pathways for trichloroethylene and perchloroethylene degradation in catalyzed H_2O_2 propagation systems [J] . Watts Richard J., Teel Amy L. Water Research . 2019,第Auga1期

机译：催化H_2O_2繁殖系统中三氯乙烯和高氯乙烯降解的羟基自由基和非羟基自由基途径
4. New chemical planarization of SiC and GaN using an Fe plate in H_2O_2 solution [C] . J. Murata, A. Kubota, K. Yagi, Silicon Carbide and Related Materials 2007 . 2009

机译：在H_2O_2溶液中使用Fe板对SiC和GaN进行新的化学平坦化
5. I. Airglow on Mars: Model predictions for the oxygen IR atmospheric band at 1.27 micrometers, the hydroxyl radical Meinel bands and the hydroxyl radical A-X band system. II. Physical and chemical aeronomy of HD 209458b . [D] . Garcia Munoz, Antonio. 2006

机译：I.火星上的气辉：1.27微米处的氧气红外大气带，羟自由基Meinel谱带和羟自由基A-X谱带系统的模型预测。二。 HD 209458b的理化空气动力学。
6. Environmentally Persistent Free Radicals (EPFRs) - 2. Are Free Hydroxyl Radicals Generated in Aqueous Solutions? [O] . Lavrent Khachatryan, Barry Dellinger -1

机译：环保自由基（EPFRS） - 2.在水溶液中产生游离羟基自由基吗？
7. Highly selective phenol production from benzene on a platinum-loaded tungsten oxide photocatalyst with water and molecular oxygen: selective oxidation of water by holes for generating hydroxyl radical as the predominant source of the hydroxyl group [O] . Tomita Osamu, Ohtani Bunsho, Abe Ryu 2014

机译：在水和分子氧的载铂的氧化钨光催化剂上从苯中高度选择性地生产苯酚：通过孔选择性氧化水以产生羟基自由基作为主要的羟基来源
8. Selected Specific Rates of Reactions of Transients from Water in Aqueous Solution. III. Hydroxyl Radical and Perhydroxyl Radical and Their Radical Ions, [R] . ross, farhataziz ross, alberta b. 1977

机译：水中瞬态反应的特定反应速率。 III。羟基自由基和过羟基自由基及其自由基离子，

Chemical planarization of GaN using hydroxyl radicals generated on a catalyst plate in H_2O_2 solution

摘要

著录项

相似文献

相关主题

期刊订阅