Low temperature growth of pseudocubic perovskites by off-axis rf magnetron sputtering for the realization of epitaxial ferroelectric-based heterostructures

摘要

We report on the epitaxial growth at low temperature and structural properties of some pseudocubic perovskite thin films using an off-axis rf magnetron sputtering technique. Epitaxial Pb(Zr_(0.2)Ti_(0.8))O_3, Sr(Ru_(0.37)Ti_(0.63))O_3, and La_(0.67)Ca_(0.33) MnO_3 thin films have been obtained on (100) SrTiO_3 substrates and are characterized using x-ray diffraction, scanning probe microscopy, and transport and polarization hysteresis loop measurements. The obtained films reveal an extremely high degree of structural quality including surfaces with very low corrugation and good transport or ferroelectric properties. Low temperature growth further opens the possibility of producing epitaxial heterostructures where Sr(Ru_(0.37)Ti_(0.63))O_3 or La_(0.67)Ca_(0.33)MnO_3 is grown on top of the Pb(Zr_(0.2)Ti_(0.8))O_3 ferroelectric layer. Such ferroelectric field effect devices with inverted structure present good interfaces leading to an important relative change in resistance (ΔR/R). They are furthermore well adapted to local probe investigations of the field polarized channel.