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首页> 外文期刊>Journal of Applied Physics >Defect imaging in multicrystalline silicon using a lock-in infrared camera technique
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Defect imaging in multicrystalline silicon using a lock-in infrared camera technique

机译:使用锁定红外摄像头技术在多晶硅中进行缺陷成像

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摘要

We image the lifetime distribution of multicrystalline silicon wafers by means of calibrated measurements of the free-carrier emission using an infrared camera. The spatially resolved lifetime measurements are performed as a function of the light-generated excess carrier density, showing a pronounced increase in lifetime with decreasing injection density at very low injection levels. Two theoretical models are applied to describe the abnormal lifetime increase: (ⅰ) minority-carrier trapping and (ⅱ) depletion region modulation around charged bulk defects. The trapping model is found to give better agreement with the experimental data. By fitting the trapping model to each point of the lifetime image recorded at different injection levels, we generate a trap density mapping. On multicrystalline silicon wafers we find a clear correlation between trap and dislocation density mappings.
机译:我们通过使用红外热像仪对自由载流子发射进行校准测量,对多晶硅晶片的寿命分布进行成像。根据光产生的过量载流子密度进行空间分辨的寿命测量,结果表明在非常低的注入水平下,随着注入密度的降低,寿命显着增加。应用了两种理论模型来描述异常寿命的增加:(ⅰ)少数载流子俘获和(ⅱ)带电体缺陷周围的耗尽区调制。发现捕集模型与实验数据具有更好的一致性。通过将捕获模型拟合到以不同注入水平记录的寿命图像的每个点,我们生成了陷阱密度映射。在多晶硅晶片上,我们发现陷阱和位错密度图之间存在明显的相关性。

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