CoRuCr-oxide intermediate layers for perpendicular magnetic recording media

摘要

CoRuCr-oxide based intermediate layers have been introduced as a replacement for pure Ru-based intermediate layers in perpendicular recording media. It was observed that the CoRuCr intermediate layers provide better C-axis orientation than the Ru intermediate layers. The introduction of oxygen during the deposition of CoRuCr increases the C-axis dispersion slightly but it is still comparable to that of Ru intermediate layer. Grain size and grain size distribution were reduced with CoRuCr-oxide intermediate layers. Magnetic properties were also optimized, indicating that the CoRuCr-oxide intermediate layers are good candidates for perpendicular recording media.