Performance Of An Optimized Substrate-free Focal Plane Array For Optical Readout Uncooled Infrared Detector

摘要

This note presents an optimized substrate-free focal plane array (FPA), which is implemented in an optical readout uncooled infrared (IR) detector. The supporting frame of such FPA is a temperature-variable one due to the large decreases in both the heat capacity and the thermal conductance. This brings a unique thermal characteristic: the supporting frame functions as a "thermal isolation" frame which reduces the thermal conductance and therefore increases the temperature change and also functions as a "thermal diffusion" frame which certainly results in the temperature prechange in the ones not absorbing IR radiation. This characterization could significantly increase the temperature change of microcantilevers and therefore improve the performance of the substrate-free FPA. In the proposed IR detector, the fabricated 160 × 160 FPA has an average noise equivalent temperature difference (NETD) and a response time of 330 mK and 16 ms, respectively. The performance of the IR detector theoretically increases by about 5.5 times compared with the one using a substrate FPA. Here, the geometry of the substrate FPA is just the same as the fabricated FPA, but the supporting frame is assumed to be a temperature-constant one. If the optical readout sensitivity can be increased enough using an enhanced IR absorber, the fabricated FPA thus has the potential to achieve a NETD value of 70 mK.