Direct Simulation Monte Carlo Study Of The Formation And Growth Of Clusters In The Case Of Vapor Expansion From A Suddenly Switched Spherical Source

摘要

The processes of formation of silicon clusters in the case of vapor expansion from a suddenly switched spherical source into an ambient inert gas are considered. Vapor expansion and condensation are described by the direct simulation Monte Carlo method. A model of clusterization is proposed, which describes reactions leading to the growth and decomposition of clusters and corresponding energy-transfer processes. The main features of cluster formation in the case of vapor expansion into a gas are considered.