Fabrication of Microparticle Layer by Annealing Microparticle/Polymer Composite

摘要

A simple and extensively applicable technique of fabricating microparticle layers was developed. Pure microparticle layers can be formed by annealing microparticle/polymer composite sheets on targets. During the annealing process, the polymer is pyrolytically decomposed and evaporated from the composite sheets. As a result, a layer consisting entirely of microparticles is formed on the target. Using this technique, silicon carbide whiskers and diamond microparticle layers were successfully fabricated on Si wafers.