Production of Nanocrystalline TiO_2 Powder by a Microwave Plasma-Torch and Its Characterization

摘要

This work shows that nanocrystalline titanium dioxide (TiO_2) particles are directly synthesized in an atmospheric microwave plasma-torch, using gas-phase titanium tetrachloride (TiCl_4), O_2, and H_2 as reactants. The as-synthesized samples were characterized by employing scanning electron microscope (SEM), transmission electron microscope (TEM), and X-ray diffractometer (XRD). The ratio of anatase and rutile depended strongly on the flow rate of H_2 injected into the microwave plasma-torch, showing the maximum anatase fraction of 94% at the flow rate of 30 sccm H_2 for the range of O_2 flow rate.