A High-Throughput Screening System for Thermoelectric Material Exploration Based on a Combinatorial Film Approach

摘要

A high-throughput system that consists of a combinatorial tool (a sputtering deposition tool and a pulsed laser deposition tool) and two developed property screening devices was used for thermoelectric material exploration. The thermoelectric power factor (S_σ~2, S = Seebeck coefficient, σ = electrical conductivity) screening device allows us to measure electrical conductivity and Seebeck coefficient of over 1000 sample-points within 6h. The thermal effusivity measurement system using the frequency domain thermoreflectance technique allows us to screen thermal conductivity of combinatorial/conventional films. Illustrations of these applications are provided with a Co-Sn-Ce/Si(100) film for power factor determination and with a Ba_2YCu_3O_7/SrTiO_3(100) film for thermal conductivity derivation.