Phase Transition Mastering Technology for the Stamper of Blu-ray Recordable Disc

摘要

This study presents a novel phase transition mastering (PTM) technology, having examined the feasibility to manufacture a stamper of Blu-ray recordable discs (BD-R). The presented PTM technology involves triple-layers coated on glass comprising a silicon layer, a inorganic photoresist layer, and a typical organic photoresist layer. The results reveal that the silicon layer is an integral part of light absorption in increasing the absorbed energy of the laser beam and an inorganic photoresist material, instead of traditional organic photoresist material used as the active layer for laser lithography. Moreover, an organic photoresist layer was formed on the top of the inorganic photoresist layer to prevent damage from the developing process, ensuring that the PTM stamper has a smooth surface. Detailed processes were revealed and the characteristics of BD-R 4x disc using PTM stamper were demonstrated to confirm the feasibility of commercialization.