Cross-Section Analysis by Electron Backscatter Diffraction of Textured BaTiO_3 Thick Films Prepared by Screen Printing

摘要

Cross sections of textured BaTKVbased thick films prepared by screen printing were successfully analyzed by electron backscatter diffraction and scanning electron microscopy. The textured thick films were prepared by repeating the screen printing and firing processes three times. During the firing of the third layer, the calcined powder formed round particles that were integrated into the grain. The results of crystal direction map analysis of the cross sections of the thick films showed that the degree of (100) orientation increased as the firing time increased. This tendency agrees with the change in the value of the Lotgering factor. Many {111} double twins were observed in the textured thick films, which may have facilitated the formation of the textured BaTiO_3 thick film.