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High temperature nano-coated electric-arc-induced long-period gratings working at the dispersion turning point for refractive index sensing

机译:高温纳米涂层电弧感应长周期光栅,在色散转折点工作,用于折射率传感

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摘要

In this paper we present for the first time electric-arc-induced long-period gratings (LPGs) working at the dispersion turning point (DTP) in the wavelength range of about 1550 nm. The DTP is achieved by reducing the grating period down to about 190 μm. In contrast to LPGs fabricated with the typical UV laser-based method, arc-induced gratings show high thermal stability and excellent long-term performance. These advantages make it possible to coat the LPGs using thin-film deposition methods, which require high temperatures. We present the effect of thin silicon nitride (SiN_x) overlay deposited by the radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD) method. This technique increased the refractive index sensitivity of the LPGs from 400-700 nm/refractive index unit (RIU) to 887-2146 nm/RIU.
机译:在本文中,我们首次提出了在约1550 nm波长范围内在色散转折点(DTP)上工作的电弧感应长周期光栅(LPG)。 DTP通过将光栅周期减小到大约190μm来实现。与使用典型的基于UV激光的方法制造的LPG相比,电弧感应光栅显示出高的热稳定性和出色的长期性能。这些优点使得可以使用需要高温的薄膜沉积方法涂覆LPG。我们介绍了通过射频等离子体增强化学气相沉积(RF PECVD)方法沉积的薄氮化硅(SiN_x)覆盖层的效果。该技术将LPG的折射率灵敏度从400-700 nm /折射率单位(RIU)增加到887-2146 nm / RIU。

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  • 来源
    《Japanese journal of applied physics》 |2014年第8s2期|08ME01.1-08ME01.5|共5页
  • 作者单位

    Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, 00-661 Warsaw, Poland;

    Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, 00-661 Warsaw, Poland;

    Centre de recherche en photonique, Universite du Quebec en Outaouais, Gatineau, QC J8X 3X7, Canada;

    Centre de recherche en photonique, Universite du Quebec en Outaouais, Gatineau, QC J8X 3X7, Canada;

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