Wafer-scale development and experimental verification of 0.36 mm~2 228 mV open-circuit-voltage solid-state CMOS-compatible glucose fuel cell

摘要

The world's smallest (0.36 mm(2)) solid-state CMOS-compatible glucose fuel cell, which exhibits an open-circuit voltage (OCV) of 228 mV and a power generation density of 1.32 mu W/cm(2) with a 30 mM glucose solution, is reported in this paper. Compared with conventional wet etching, dry etching (reactive ion etching) for patterning minimizes damage to the anode and cathode, resulting in a cell with a small size and a high OCV, sufficient for CMOS circuit operation. (C) 2018 The Japan Society of Applied Physics.