Microactuators for Fluidic Applications: Principles, Devices, and Systems

摘要

Much effort in microfluidics research has been aimed at designing microscale pumps, valves, switches, dispensers, mixers, filters, separators, and so on, which have a major role in the development of innovative systems like chemical process control, bioanalytical devices, medical drug delivery systems, environmental control, and others. Most of these microfluidic devices have one thing in common: the need for precise manipulation and control of small amounts of fluids. MEMS/NEMS research is continuously opening up new knowledge on modeling approaches, novel materials, and MEMS/ NEMS processing technologies that stimulate and accelerate the development of new actuation principles and novel actuator configurations. This review paper presents research work on different actuation techniques that are used for the whole range of microfluidic applications. It covers thermomechanical and electrochemical actuation principles, as well as actuation induced with external electric or magnetic fields. It presents a brief explanation of the operating principle of each type of actuator, actuator configuration, its main characteristics, like power consumption, operational voltage, frequency range, and working fluids, and a discussion of comparisons among different actuation schemes. This study compiles and provides some basic guidelines for selection of the actuation schemes that are currently implemented in microfluidic devices.