Dynamics design and analysis of direct-drive aerostatic slideways in a multi-physics simulation environment

摘要

Direct-drive aerostatic slideways work in a multi-physics environment by coupling with electrical actuation, heat, force and pressured airflow conditions. In this paper, the relationship between multi-physics coupling data within the design and analysis of the direct-drive aerostatic slideway is investigated. A corresponding design and analysis platform has been developed so as to obtain the optimal performance of the slideway at nanometric levels of accuracy in dynamic working conditions. The fluctuating characteristics of slideways together with load, multiple heat sources and gas fluid environment were investigated using the platform. Microscopic deformations of the slideway as a function of film thickness and temperature were identified. The main differences from the design nominal values caused by multi-physics interactions are analyzed and compared with non-coupling design and test data. The case study data are in accordance with the predicted results. The proposed investigation scheme is efficient in identifying the transient deviation in bearing capacity, stiffness of the slideway, and the micro-morphology of the floating surface, such as thermal deformation of the slideway. A multi-physics simulation environment is essential to realize the seamless integrated design and analysis of aerostatic slideways at a nanometric level of accuracy. It can be also extended as a system for education and training purposes.