Contact-Type Profile Measuring Device Using Laser Interferometry System Incorporating Hybrid Actuating System

摘要

This paper proposes a contact-type profile measuring device using a laser interferometry system for precision components. This measuring device consists of an XY-table actuated by linear motors to obtain large operational ranges, an active contact probe driven by piezoelectric actuators to provide a small measuring force, and a specially configured optical path to reduce Abbe's error. Fundamental experiments were performed to examine the control performance of the active probe, forward and backward motion behaviors of the hybrid actuating system, and contour measurement for an aspheric mold. As one example of the measured results, a maximum form error of 1.45 μm was obtained for an aspheric surface with a measured span of 4 mm and a sag of 37 μm. As a prototype high-precision measuring system, the effectiveness of the optical path and actuating system have been demonstrated. Further studies are suggested to improve the system performance by reducing the measuring force, increasing the measuring speed, and providing a scanning function.