On-Line Fast Analysis of VOC from ppt to % in Process and Ambiance Monitoring

摘要

Microelectronics semiconductor companies have interest for solutions able to ensure people's safety and control a good repeatability of industrial process. Chromatotec (France) have recently provided complementary solutions for the contaminants for this market with combined solutions. The "AirmoSCANXpert" solution is dedicated to ambient air, the second one "Chroma THC" analyser to process control. Considering that electronic boards are produced in clean air room by complex lithographic process, it can be consider that the use of very reactive chemicals is important. It is universally known that particle control is an essential part of the semiconductor fabrication process. Clean room technology, which relies on the use of HEPA and ULPA filtration, has in the past almost exclusively focused on the control of micro- and nano-particles. Nevertheless, as a consequence of device reduction, AMCs have also become a key detractor of yield. The nature and concentration of AMCs can be different depending on the chemical process and can also vary rapidly. These AMCs can impact the process and reduce the lifetime of equipment. Among the AMCs, silicon compounds are very problematic because they combine with oxygen to create amorphous silicon dioxide on optical surfaces, leading to non-reversible lens damages. These optical tools are very expensive and need to be protected. Therefore, there is a need to analyse precisely and continuously gas process in air with an instrument designed for industrial use. For such demand, Chromatotec have provided AirmoSCAN Xpert, his last very sensitive online GC-MS-FID instrument for VOC identification and quantification. With such solution, it is now possible to track 100 VOC+ and monitor molecules listed in PAMS 56, TOM, TO15, etc.).