Modified Sol-Gel Process for the Preparation of BaTiO_3 and PbTiO_3 Ferroelectric Films

摘要

A modified method for preparing barium and lead titanate films is suggested, which combines precipitation from solution and elements of sol-gel processing. The ～1μ-thick BaTiO_3/Pt and PbTiO_3/Pt films deposited on Pt foil are transparent, show good adhesion, and have the 1:1:3 stoichiometry. The films are finegrained, with a mean grain size of 0.1-0.2 μm. The barium titillate films are characterized by t_c=110-125degC, ε＿20=167-500, tanδ＿20=0.015-0.06, ε_max=1050, ;_s=3.2μC/cm~2, E_c=14 kV/cm, ρ=(5-7) x 10~9 Ω cm, and V_br=80-150 kV/cm. The lead titillate films are characterized by c/α=1.056, ε _20=105-110, tanδ＿20=0.11-0.16, P_s=4.1μC/cm~2, E_c=34 kV/cm, ρ =(0.8-3.0) x 10~9Ω cm, and V_br=50-100 kV/cm.