Evolution in LTPS AMLCD Manufacturing via Advances in Laser Crystallization Techniques and Systems

摘要

Substantial R&D activities are presently under way toward the development of advanced pulsed-laser-based production tools and processes that can enable sophisticated yet effective crystallization of Si films for manufacturing advanced active-matrix liquid-crystal displays (AMLCDs) that utilize polycrystalline-Si films. Implementation of such techniques in volume production, which has actually already begun, is poised to potentially permit low-temperature polycrystalline-Si (LTPS) AMLCD technology to pursue a more aggressive product and manufacturing roadmap.