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Silicon and Ⅲ-Ⅴ nanoelectronics

机译:硅和Ⅲ-Ⅴ纳米电子学

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摘要

It is not often that the IT market kings talk to the Ⅲ-Ⅴs communities. What makes Intel's Summan Datta so intriguing is that he is, as it were, 'poacher turned gamekeeper' having compound as his first discipline before joining the silicon world. His global take is intriguing, and initially he dealt with aggressive scaling, gate oxides and success with the 90nm logic node covering the introduction of epitaxial SiGe SiGe in the source-drain regions of PMOS transistors to incorporate significant levels of uniaxial com-pressive strain into the Si channel and enhance hole mobility. Continued gate stack scaling requires alternate dielectric with higher dielectric constant and larger physical thickness, and SiO_2 is running out of atoms to scale. Hafnium and zirconium based high-k dielectrics (HfO_2 and ZrO_2) emerge as the most promising candidates for the future, due to their sufficiently large band offsets, thermody-namic stability with Si and high frequency response.
机译:IT市场之王很少与Ⅲ-Ⅴ族对话。英特尔的Summan Datta之所以如此吸引人,是因为他确实是“偷猎者转变为游戏玩家”,在加入芯片世界之前,他的第一门学科就是复合技术。他的全球眼光令人着迷,最初他从事积极的缩放,栅极氧化物以及成功的90nm逻辑节点的研究,涉及将外延SiGe SiGe引入PMOS晶体管的源极-漏极区域,以将显着水平的单轴压缩应变纳入Si通道并增强空穴迁移率。持续的栅堆叠缩放要求交替的介电层具有更高的介电常数和更大的物理厚度,并且SiO_2耗尽了要缩放的原子。 their和锆基高k电介质(HfO_2和ZrO_2)由于其足够大的带隙偏移,Si的热力学稳定性和高频响应而成为未来最有希望的候选材料。

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