Practical Inverse Modeling with SIESTA

摘要

We present a simulation system which meets the requirements for practical application of inverse modeling in a professional environment. A tool interface for the integration of arbitrary simulation tools at the user level is introduced and a methodology for the formation of simulation networks is de- scribed. A Levenberg-Marquardt optimizer automates the in- verse modeling procedure. Strategies for the efficient execution of simulation tools are discussed. An example demonstrates the extraction of doping profile information on the basis of electrical measurements.