圧電素子を用いたひずみ量フィードバックによる高精度位置決め制御

摘要

This paper presents a novel control methodology for robust high-precision positioning systems. This methodology is based strain feedback using a piezoelectric element. The mechanical vibration modes at around the control bandwidth cause the deterioration of system stability. This prevents the positioning performance from being robust, particularly against variations in the vibration frequency. In this research, therefore, a robust positioning system was designed by applying an additional compensation loop by strain feedback; here, a piezoelectric element that acts as a strain sensor detects the vibration signal. This makes the performance of the system robust. The proposed compensation approach has been verified by numerical analyses and by experiments using a positioning device for industrial galvano scanners.%工作機械や情報機器で代表される各種メカトロニクス機rn器の制御仕様は年々高度化し，その中核を担う位置決め機rn構の高速?高精度化は必須の課題である。その解決策のrn本質的アプローチは，制御系の位置サーボ帯域を拡大して，rn高速応答と外乱抑圧特性の向上を実現することである。しrnかし，サーボ帯域が機構系の主共振周波数（最低次の共振）rnに近接すると，共振振動や系の不安定化がサーボ帯域拡大rnを阻害する。