A micromachined Fresnel zone-plate has been used to focus ultrasonic waves in air over a range of frequencies (450 to 900 kHz). The zone-plate was mounted upon a planar micromachined air-coupled capacitance transducer, which was capable of generating toneburst ultrasonic waves in air over a wide frequency bandwidth (>100 kHz to 2 MHz). A second air-coupled capacitance detector (apertured to 200 /spl mu/m) was scanned in the field of the zone-plate source in order to image the generated ultrasonic field at various frequencies of operation. It was found that the /spl sim/680 /spl mu/m spot size of the experimental zone-plate did not vary appreciably with changing frequency, whereas the focal length increased markedly with increasing frequency (from /spl sim/5 mm at 450 kHz up to /spl sim/15 mm at 900 kHz). These findings are shown to be in excellent agreement with previously reported theoretical predictions by the authors.
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