High-speed camera with a back-thinned 16-port frame transfer CCD sensor

摘要

A high-frame-rate CCD camera is described, based on the a new, back-thinned, 512/spl times/512 pixel frame transfer sensor with 16 video ports. The sensor allows for imaging beyond the visible range within a large dynamic range. Circuits for testing and evaluation of the sensor over a large range of charge transfer clock frequencies and the measured data are presented. The performance of the device when driven to the readout speed limit is also discussed.