Development and Evaluation of an Active Magnetic Guide for Microsystems With an Integrated Air Gap Measurement System

摘要

An active magnetic levitation system based on repulsive magnetic forces was developed as a guide for a linear hybrid microstep motor. With this levitation system, the vertical force, which is typically an order of magnitude greater than the driving force, can be compensated. A capacitive measurement system provides measurement data to maintaining a constant air gap. This paper presents the design, fabrication, and first measurement results of the magnetic guide and the air gap measurement sensor