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A comparison of film structure and surface chemistry of carbon and oxide disk overcoats

机译:碳和氧化物盘面涂层的膜结构和表面化学比较

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Satisfactory durability and stiction results have been obtained with hydrogenated carbon, zirconia, and silica overcoated disks lubricated with a perfluoropolyether with functional end groups. Higher levels of lubricant bonding at room temperature are observed on silica and zirconia surfaces. It is believed that this is related to the high levels of surface OH for these overcoats. The lubricant affinity for the overcoat is believed to be a primary factor in the durability and stiction performance of the disk. Thus, oxide overcoats should have an inherent advantage over diamond-like carbon because of surface chemistry; however, processing restrictions such as the need for RF sputtering and sensitivity to sputter defects make their use less attractive.
机译:用氢化碳,氧化锆和涂有带官能端基的全氟聚醚润滑的二氧化硅涂层圆盘可获得令人满意的耐久性和静摩擦结果。在室温下,在二氧化硅和氧化锆表面上观察到较高水平的润滑剂粘结。相信这与这些外涂层的高表面OH含量有关。认为对外涂层的润滑剂亲和力是盘的耐久性和静摩擦性能的主要因素。因此,由于表面化学的原因,氧化物外涂层应该比类金刚石碳具有固有的优势。然而,诸如RF溅射的需要和对溅射缺陷的敏感性之类的处理限制使得它们的使用吸引力降低。

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