Micro magnetic thin-film sensor using LC resonance

摘要

This paper reports the performance of a new micro magnetic thin-film magnetic field sensor which makes use of LC resonance of the sensor element as well as the impedance change due to the permeability change of the magnetic film. A large impedance change of 105% was achieved at a carrier frequency of 100 MHz. The large change was realized when the LC resonance frequency of the sensor element was lower than the frequency at which the eddy-current losses increased.