Application of micromachine technologies to hard disk drives

摘要

We propose applications of micromachine technologies to increase the areal density of Hard Disk Drives (HDDs). The most attractive ways to increase the density are head positioning with high accuracy and ultra-low flying height of head sliders. We propose two micro actuators and a non-assembly micro structure. One of micro actuators is essential to achieve highly accurate positioning of head. The other actuator and the non-assembly micro structure are very useful to reduce flying height of sliders. We show the feasibility of these proposals by preliminary experiments.