High-Speed (60 GHz) and Low-Voltage-Driving Electroabsorption Modulator Using Two-Consecutive-Steps Selective-Undercut-Wet-Etching Waveguide

摘要

Based on a novel structure of waveguide, a broadband electroabsorption modulator (EAM) with low driving voltage and high extinction ratio has been demonstrated in this letter. The waveguide of InGaAsP-InP p-i-n layer structure is fabricated by two consecu