Modeling of CMOS-SOI-MEMS Thermal Antenna for Monolithic Passive Uncooled THz Imagers

摘要

We present electromagnetic, thermal, electrical, and mechanical modeling and simulations of uncooled passive THz imaging sensor based on a thermal antenna. The 2-D CMOS-SOI-MEMS imager pixel array constitutes a frequency selective surface tuned to the desired wavelength band. The modeling predicts enhanced performance of the symmetric design in terms of electromagnetic absorption, mechanical planarity, thermal response, and electrical signal.