Electromagnetic 2D Scanning Micromirror for High Definition Laser Projection Displays

摘要

We present the design, fabrication, and analysis of an electromagnetic biaxial scanning micromirror for a high definition laser pico-projection display system. The device consists of a microfabricated double gimbaled structure for mechanical amplification of horizontal scan angle and a set of uniquely designed permanent magnets for high magnetic field generation in a small volume. With the fabricated 1.2-mm-diameter micromirror, the maximum scan angle of 52° at 28.9 kHz and 33° at 60 Hz have been obtained for horizontal and vertical scans, respectively. The effective volume of the packaged micromirror measures 0.34 cm^{3. A prototype full-color pico-projection display system has been fabricated with micromirror package and laser sources integrated into a 3.7 cm3volume.}