Quantum-well intermixing for fabrication of lasers and photonicintegrated circuits

摘要

Various applications of quantum-well intermixing, ranging fromnmultiwavelength lasers to complex photonic integrated circuits, arendescribed. The fabrication of these GaAs-AlGaAs-based devices relies onnthe postgrowth definition of regions with varying bandgap, enabling thenmanufacture of wavelength shifted modulators and lasers, as well as thenintegration of transparent waveguides with absorbing lasers andndetectors. The impurity-free vacancy-enhanced disordering techniquenemployed, and its integration with existing process technologies, willnbe presented, and examples of multicolor lasers, wavelength shiftednmodulators and integrated optical interferometers are shown. Thesenapplications yield high-optical functionality using relatively simplenprocess and integration technology