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Nanophotonics: design, fabrication, and operation of nanometric devices using optical near fields

机译:纳米光子学:使用光学近场的纳米器件的设计,制造和操作

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This paper reviews progress in nanophotonics, a novel optical nanotechnology, utilizing local electromagnetic interactions between a few nanometric elements and an optical near field. A prototype of a nanophotonic integrated circuit (IC) is presented, in which the optical near field is used as a carrier to transmit a signal from one nanometric dot to another. Each section of this paper reviews theoretical and experimental studies carried out to assess the possibility of designing, fabricating, and operating each nanophotonic IC device. A key device, the nanophotonic switch, is proposed based on optical near-field energy transfer between quantum dots (QDs). The optical near-field interaction is expressed as the sum of the Yukawa function, and the oscillation period of the nutation of cubic CuCl QDs is estimated to be less than 100 ps. To guarantee one-directional (i.e., irreversible) energy transfer between two resonant levels of QDs, intrasublevel transitions due to phonon coupling are examined by considering a simple two-QD plus phonon heat bath system. As a result, the state-filling time is estimated as 22 ps for CuCl QDs. This time is almost independent of the temperature in the Born-Markov approximation. Using cubic CuCl QDs in a NaCl matrix as a test sample, the optical near-field energy transfer was experimentally verified by near-field optical spectroscopy with a spatial resolution smaller than 50 nm in the near-UV region at 15 K. This transfer occurs from the lowest state of excitons in 4.6-nm QDs to the first dipole-forbidden excited state of excitons in 6.3-nm QDs. To fabricate nanophotonic devices and ICs, chemical vapor deposition using an optical near field is proposed; this is sufficiently precise in controlling the size and position of the deposited material. A novel deposition scheme under nonresonant conditions is also demonstrated and its origin is discussed. In order to confirm the possibility of using a nanometric ZnO dot as a light emitter in a nanophotonic IC, spatially and spectrally resolved photoluminescence imaging of individual ZnO nanocrystallites was carried out with a spatial resolution as high as 55 nm, using a UV fiber probe, and the spectral shift due to the quantum size effect was found. To connect the nanophotonic IC- to external photonic devices, a nanometer-scale waveguide was developed using a metal-coated silicon wedge structure. Illumination (wavelength: 830 nm) of the metal-coated silicon wedge (width: 150 nm) excites a TM plasmon mode with a beam width of 150 nm and propagation length of 2.5 Μm. A key device for nanophotonics, an optical near-field probe with an extremely high throughput, was developed by introducing a pyramidal silicon structure with localized surface plasmon resonance at the metallized probe tip. A throughput as high as 2.3% was achieved. Finally, as an application of nanophotonics to, a high-density, high-speed optical memory system, a novel contact slider with a pyramidal silicon probe array was developed. This slider was used for phase-change recording and reading, and a mark length as short as 110 nm was demonstrated.
机译:本文回顾了纳米光子学的进展,这是一种新颖的光学纳米技术,它利用了一些纳米元素和光学近场之间的局部电磁相互作用。提出了一种纳米光子集成电路(IC)的原型,其中光学近场用作载体,将信号从一个纳米点传输到另一个纳米点。本文的每个部分回顾了进行的理论和实验研究,以评估设计,制造和操作每个纳米光子IC器件的可能性。基于量子点(QD)之间的光学近场能量转移,提出了一种关键设备纳米光子开关。光学近场相互作用表示为Yukawa函数之和,立方CuCl QD的章动的振荡周期估计小于100 ps。为了保证两个共振能级量子点之间的单向(即不可逆)能量转移,通过考虑一个简单的两量子点加声子热浴系统来研究声子耦合引起的子内能级跃迁。结果,对于CuCl QD,状态填充时间估计为22 ps。该时间几乎与Born-Markov近似中的温度无关。使用NaCl基质中的立方CuCl QD作为测试样品,通过近场光谱在15 K的近紫外区域中通过空间分辨率小于50 nm的实验验证了近场能量的光学传递。从4.6 nm QD的最低激子状态到6.3 nm QD的第一个偶极子禁态激发态。为了制造纳米光子器件和IC,提出了使用光学近场的化学气相沉积技术。这在控制沉积材料的尺寸和位置方面足够精确。还展示了一种在非谐振条件下的新型沉积方案,并讨论了其起源。为了确认在纳米光子IC中使用纳米ZnO点作为发光体的可能性,使用紫外线光纤探针对单个ZnO纳米微晶进行了空间和光谱分辨的光致发光成像,其空间分辨率高达55 nm,发现了由于量子尺寸效应引起的光谱偏移。为了将纳米光子IC-连接到外部光子器件,使用金属涂层的硅楔结构开发了纳米级波导。金属涂覆的硅楔形物(宽度:150 nm)的照明(波长:830 nm)激发具有150 nm光束宽度和2.5μm传播长度的TM等离子体激元模式。通过在金属化探针尖端引入具有局部表面等离振子共振的角锥体硅结构,开发出了纳米光子学的关键设备,即具有极高通量的光学近场探针。吞吐量高达2.3%。最终,作为纳米光子技术在高密度,高速光学存储系统上的应用,开发了一种具有锥体硅探针阵列的新型接触滑块。该滑块用于相变记录和读取,并且证明了短至110nm的标记长度。

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