Integrated fluidic lenses and optic systems

摘要

Functionally integrated fluidic lenses and lens systems were demonstrated. Fluidic optic lenses can function as lenses with tunable focal distance, lens doublets with variable and convertible lens type, zoom lenses, and a lens system possessing both telephoto and reverse telephoto functions. High lens power and broad tuning range were achieved in a single 20-mm aperture device that can be tuned to have a convex or concave shape, with the respective tunable focal distance from 14.3 mm to infinity and from -6.1 mm to negative infinity. For fluidic adaptive zoom-lens-on-a-chip, a zoom ratio of 2.14 was achieved for 20-mm lens aperture, and a zoom ratio of 2.83 for 5-mm lens aperture. For the latter device, a tunable field-of-view from 10/spl deg/ to 80/spl deg/ was demonstrated, suggesting that the functions of telephoto and reverse telephoto systems can be achieved in a single zoom lens chip. Finally, the fluidic devices including the microfluidic pumps can be integrated with the lenses. All these integrated fluidic lenses and lens systems were microfabricated using a modified UV-LIGA process.