Distribution of Heat-Transfer Coefficients from Small Surfaces Cooled with Submerged Jets of Fluorocarbon Liquid Determined by an Inverse Heat-Conduction Analysis

摘要

The method of inverse analysis was used to determine the distribution of heat-transfer coefficients of a silicon heater cooled with submerged jets of fluorocarbon liquid. The silicon heater was made specifically to investigate high-performance cooling systems of electronic devices. The heater was constructed of many cells which can independently generate heat and measure the temperature on one side of the heater, and it was cooled from the other side of the heater. Inverse analysis was used to eliminate the effect of heat conduction in the heater and to determine the distribution of heat-transfer coefficients on the cooling surface. The heat-transfer coefficients were also measured by independent techniques to confirm the values determined with the inverse analysis. One of these independent techniques was to control the heater power to produce a uniform temperature. Another technique was to use a SUS film heater. The distributions of heat-transfer coefficients determined with these three techniques were in reasonable agreement.