FEASIBILITY OF AN IN-VACUO IMPLEMENTATION OF GLOW-DISCHARGE OPTICAL SPECTROSCOPY AND STATUS OF ITS DEVELOPMENT FOR THE PSI-2 FACILITY

摘要

This paper discusses an ongoing effort to evaluate the use of Glow Discharge Optical Emission Spectroscopy (GDOES) for after-exposure, target surface characterization in a plasma-materials interactions (PMI) facility, without need to remove the sample from the facility's vacuum chamber and/or to expose the sample's surface to air. The effort includes testing of a compact, inductively-coupled plasma (ICP) source, which would eventually become part of an integrated, movable GDOES sub-chamber, including plasma source, gas-feed and pumping capability, configured to function inside the main vacuum chamber. The present, conceptual design for implementation on PSI-2 shows promise in meeting these challenges and is presented here.