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An Innovative Microelectrode Fabricated Using Photolithography for Measuring Dissolved Oxygen Distributions in Aerobic Granules

机译:使用光刻技术制造的新型微电极,用于测量好氧颗粒中的溶解氧分布

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In this work an innovative microelectrode was successfully fabricated using photolithography for determination of dissolved oxygen distributions in aerobic granules, which were sampled from a nitrifying sequencing batch reactor. A negative photoresist, SU-8, was used as a substrate for the microelectrode and a 70 μm wide needle was photopatterned on it The microelectrode could be renewed several times. Cyclic voltammetry analysis and dissolved oxygen measurement demonstrated that the microelectrode was stable and reliable. Dissolved oxygen distribution in a nitrifying granule was successfully monitored with the microelectrode. The profiles indicated that the main active part of the nitrifying granule was the upper 150 μm layer. Using the procedures developed in this work, microelectrodes of the desired shape could be constructed with precise size control at micrometers-scale.
机译:在这项工作中,使用光刻技术成功制造了一种创新的微电极,用于测定需氧颗粒中的溶解氧分布,需氧颗粒是从硝化测序间歇反应器中取样的。将负性光刻胶SU-8用作微电极的基材,并在其上进行70μm宽的针状光图案化。微电极可以更新几次。循环伏安法和溶解氧测量表明该微电极稳定可靠。用微电极成功监测了硝化颗粒中的溶解氧分布。剖面表明硝化颗粒的主要活性部分是上层150μm层。使用在这项工作中开发的程序,可以在微米级上通过精确的尺寸控制来构造所需形状的微电极。

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