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Effect of supply/exhaust diffuser configurations on the contaminant distribution in ultra clean environments: Eulerian and Lagrangian approaches

机译:供气/排气扩散器配置对超净环境中污染物分布的影响:欧拉和拉格朗日方法

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摘要

In this research, the airflow pattern and particle dispersion in a contaminated full-scale cleanroom are investigated numerically using both Eulerian and Lagrangian approaches. Three different supply diffuser configurations namely (1) central, (2) horizontal and (3) vertical and three different exhaust grille configurations namely (4) vertical symmetric, (5) asymmetric and (6) horizontal symmetric are selected for the analysis. The presented results reveal that the supply/exhaust openings arrangement has a significant influence on the particulate contaminant dispersion in the cleanrooms. The comparison of the above different supply diffuser configurations shows that the vertical and horizontal supply diffuser configurations lead to a more escaped particles and less deposited particles on the room walls and installed working table in the room than the central one. It is also found that for different exhaust grille arrangements, the performance of the ventilation system in the horizontal symmetric case is higher than asymmetric and vertical symmetric ones. At the same time, it is observed that the variations of contaminant concentration in both Eulerian and Lagrangian approaches are almost the same. The results of the velocity and particle concentration show good agreement with the available experimental data in the literature. (C) 2016 Elsevier B.V. All rights reserved.
机译:在这项研究中,使用欧拉和拉格朗日方法对污染的全尺寸洁净室中的气流模式和颗粒扩散进行了数值研究。选择三种不同的供气扩散器配置,即(1)中央,(2)水平和(3)垂直,以及三种不同的排气格栅配置,即(4)垂直对称,(5)不对称和(6)水平对称。呈现的结果表明,进/排气口的布置对洁净室中颗粒污染物的扩散有重大影响。上面不同的供气扩散器配置的比较表明,垂直和水平的供气扩散器配置导致房间壁和房间中安装的工作台上比中心位置更多的逸出颗粒和更少的沉积颗粒。还发现,对于不同的排气格栅布置,水平对称情况下的通风系统的性能要高于不对称和垂直对称情况下的通风系统。同时,观察到欧拉和拉格朗日方法中污染物浓度的变化几乎相同。速度和颗粒浓度的结果与文献中可用的实验数据显示出良好的一致性。 (C)2016 Elsevier B.V.保留所有权利。

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